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Samsung and Dongjin Semichem successfully developed extreme ultraviolet (EUV) photoresist (PR)

In cooperation with Samsung Electronics, Dongjin Semichem successfully developed extreme ultraviolet (EUV) photoresist (PR), an essential material for semiconductor ultra-fine processes. EUV PR is one of the three major products under Japan's export control to South Korea in 2019. The technical difficulty is high, all relying on imported products from abroad, through the mutual cooperation between South Korean enterprises, the localization has been successfully realized.


Dongjin Semichem recently passed Samsung Electronics’ EUV photoresist reliability test (quality certification). A person in the industry who knows this well said: “Dongjin Semichem developed EUV photoresist at the Hwaseong plant in Gyeonggi-do, and tested it on the EUV production line of Samsung Electronics Hwaseong, and finally obtained quality certification.” Through the cooperation of the two parties, EUV photoresist with a high level of technology can be rapidly developed."


Photoresist (PR) is also called a photosensitive liquid, which is the core material of the semiconductor exposure process. It is composed of photoinitiators (including photosensitizers, photoacid generators), resins, monomers, solvents and other additives, also known as photoresists. The photoresist can transfer the fine patterns that need to be etched from the photomask (mask) to the silicon substrate to be processed through photolithographic processes such as exposure and development through photochemical reactions. The role of photoresist, in addition to improving the processing accuracy, it can also protect the silicon substrate from corrosion and prevent the influence of ions.


In Korea, mass production of photoresists for krypton fluoride (KrF) and argon fluoride (ArF) processes has been achieved, but photoresists for EUV that can draw finer circuits have not been successfully developed. Because of the difficulty of development, most EUV photoresists used in South Korea are imported from Japan.

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