SZZC Semiconductor Materials Technology Group is the first high-tech enterprise in China to realize the localization of silicon carbide graphite susceptor and the only commercial production of SiC-coated graphite bases for semiconductor epitaxy.
In the past 20 years, SZZC has obtained more than 90 semiconductor material companies purchased in batches by well-known Chinese and international semiconductor companies. It is also a product supplier of China's semiconductor equipment leader, photoelectric leader, IC leader, national key scientific research institutes and rising stars in the semiconductor industry.
Susceptor design improvement for MOCVD Epi process with corossive chemistry in >1200 rpm and >1000°C chamber condition including SiC coating uniformity, warpage, particle and defectivity.
Customerized susceptor solution to hit the target of wavelength and extend lifetime for LED epitaxy, dopping uniformity for SiC epitaxy, coating uniformity, slipping and shiftting for IC epitaxy.
Products
Epitaxy of GaN on Sapphire
(RGB/Mini/Micro LED)
Epitaxy of GaN on Si Substrate
(UVC)
Epitaxy of GaN on Si Substrate
(Electronical Device)
Epitaxy of Si on Si Substrate
(Integrated circuit)
Epitaxy of SiC on SiC Substrate
(Substrate)
Epitaxy of InP on InP