On the morning of October 18th, China`s leading manufacturer of silicon carbide nano-mirror coatings and ceramic-based composite materials: HNDZ Advanced Materials Technology Group`s "silicon carbide nano-mirror coating graphite disk" project was completed and put into production, a project that has been monopolized by international giants. High-precision technology has been successfully industrialized in China.
Silicon carbide nano-mirror coated graphite disk is one of the key products in the semiconductor industry to break through foreign technology monopoly.
Product Features
Silicon carbide nano-mirror coating is a mirror-surface nano-silicon carbide coating synthesized in the form of atomic-level accumulation on the surface of graphite or carbon-based materials by a special chemical vapor deposition process under high temperature and high vacuum environment. The surface of the coating is smooth and uniform, has the characteristics of oxygen resistance, carbon resistance, pressure resistance, wear resistance, self-lubricating, and non-volatile. It is an inorganic non-metallic material that can withstand high temperatures of 2700°C.
Using chemical vapor deposition technology to deposit nano-silicon carbide coating on its surface, and make nano-silicon carbide infiltrate into the micropores on the surface of the carbon material, and improve the bonding strength and thermal shock of the coating and the carbon material through epitaxial growth technology and mechanical occluding method Stability of the process.
Micro Morphology
The surface of the SiC coating is smooth and compact. XRD analysis shows that the prepared coating is single-phase β-SiC.
Chai Pan, Chairman of HNDZ, said that the successful commissioning of the project indicates that HNDZ has the ability to commercialize the production of silicon carbide nano-mirror coated graphite disks, which are the core components of semiconductors. At the same time, it meets the needs of Chinese semiconductor customers for high-end products, which represents silicon carbide. The victory of the localization of coated graphite discs.
Two years ago, China's most advanced chemical vapor deposition equipment independently designed by HNDZ was commissioned and put into use. This equipment can synthesize mirror surface nano-silicon carbide coating under high temperature and high vacuum environment. At present, HNDZ is a supplier of leading companies such as Longji, China's largest monocrystalline solar energy production company, and has established long-term cooperative relationships with well-known universities such as Jilin University and Central South University.
"The project for this expansion is a silicon carbide-coated graphite base for semiconductors. The project has high technical content, strong growth capacity, and good economic benefits. It has broken through foreign technology blockades, and is important for further promoting the transformation and upgrading of the domestic semiconductor industry and strengthening the economy of Zhuzhou. Scale is of great significance." Industry insiders believe that.