On June 8, 2018, HBFL Quartz Glass Technology Corporation developed the G8 generation photomask substrate, breaking the monopoly of foreign companies, and laying a solid foundation for the sustainable development of China's aerospace, semiconductor, flat panel display, consumer electronics, solar energy and other industries .
As early as 1979, HBFL successfully trial-produced high-purity quartz fiber and silicone oil type quartz fiber in the country's first trial.
For decades, HBFL has always focused on independent innovation of high-end quartz products and technology, striving for a leading position in the industry.
"This 1.4*1.2m synthetic quartz glass plate is the only G8-generation photomask substrate developed by our company and capable of mass production in China. It is mainly used in the production of flat panel displays." According to the CTO of HBFL, China Without the production technology of photomask substrates, the market was monopolized by Japan and South Korea. Later, HBFL gradually mastered the most advanced generation 8 substrate production technology, and the price of generation 8 substrates in the international market also decreased.
Since 1999, Philippe has undertaken a large number of military products supporting research and development projects, and has received strong support from the Commission of Science, Technology and Industry for National Defense in the construction of conditions. At present, most of the projects have passed the acceptance, and the projects have been widely praised after being delivered for trial. The number of quartz fiber products has increased from the original 3 to 9 and has reached the international advanced level in terms of some key performance indicators.
What is a photomask?
In the entire process of semiconductor manufacturing, part of it is a process from layout to wafer manufacturing, that is, photomask or mask manufacturing. This part is the key part of the process connection, the most expensive part of the process, and one of the bottlenecks restricting the minimum line width. In addition to being used in chip manufacturing, photomasks are also widely used in areas such as LCD and PCB. It is one of the core materials and has been monopolized by foreign companies for a long time.
There are four types of common photomasks, chrome, dry, relief, and liquid relief. It is mainly divided into two components, the substrate and the opaque material. The substrate is usually quartz glass with high purity, low reflectivity, and low thermal expansion coefficient. The opaque layer of the chromium plate is a chromium layer with a thickness of about 0.1um plated under the glass by sputtering. The hardness of chromium is slightly lower than that of glass. Although it is not easily damaged, it may be damaged by glass. The photomask used in chip manufacturing is a highly sensitive chrome plate. The latex coated on the dry plate has a low hardness and is easy to absorb dust, but the dry plate also has a coating and a superfine particle dry plate, the latter of which can be used in chip manufacturing.
When characterizing, use a stepper to characterize (stepper), which is divided into electron beam and laser. The laser beam is directly carved on a 4-9" glass plate coated with a chromium layer, and the starting point of the edge is 5mm. Compared with the electron beam, The arc is more realistic, and the line width and spacing are smaller. The photomask has a reticle mask (also called an intermediate mask, reticle is translated as a raster as a unit), and the scale is repeatedly reduced to master maks with a stepper Above, the working mask applied to the actual exposure is a working mask, which is copied from the master mask.
HBFL, as a leading domestic and internationally well-known supplier of quartz glass materials and quartz glass fiber, has devoted itself to the construction of national defense science and technology industry. Every detail and every group of products are required to be integrated into the process to ensure that the ability is greatly improved and the quality of products and services is stable for a long time.
The core competitiveness brought by military research and development has occupied the commanding heights of the market for enterprises. In addition to leading the country in military accessory products such as quartz fiber, HBFL also leads the industry in the civilian market. The application fields of Philippine products have expanded from the traditional chemical and light source industries to solar energy, semiconductor, electronics, communications, and aviation and aerospace industries.