The design of a new infrared emitting device optimizes the uniform heating process under ultra-vacuum conditions, and will be applied in the field of photovoltaic cells and glass coatings.
Heraeus Specialty Light Source's black.infrared infrared heaters are used in the field of glass manufacturing.
At the SEMICON Taiwan exhibition held in Taipei in early September, Heraeus Noblight introduced the first black.infrared infrared heating equipment in the global semiconductor and photovoltaic industry. This device implements a new type of infrared system function based on the new emitter principle. The flat and tiny emitter is surrounded by a specially developed quartz glass. This structure helps to transfer the heat generated by the infrared emitter with a very high energy density. Avoid heater failure due to temperature rise caused by heat accumulation. Experiments have proved that this design also ensures the uniformity and effectiveness of the heat distribution in the heated space. After the transmitter is switched to black (medium wave), it can quickly and evenly heat the small space. For some places with high requirements for the heating environment, such as wafer heating during chip production, this infrared heater can greatly shorten the process time and improve the processing quality.
This transmitter is also suitable for ultra-clean processes and ultra-vacuum environments. Compared with traditional ceramic and metal emitters, this emitter can reduce the contamination of impurities during chip production. "The black.infrared infrared technology has been developed to meet the requirements of semiconductor production and optoelectronics applications. This combination of infrared and emitter technology This is a revolutionary breakthrough for an efficient, ultra-clean heating process under vacuum conditions. "
Semiconductor manufacturing likes innovative technology
Semiconductor processing technology requires a variety of thermal processing such as drying or heating during the chip production process. There are also many thermal processing processes required to manufacture the chips used in smart phones. During these heating processes, it is important to avoid adding chemical impurities and particles to the chip during the process. During the manufacturing process, even a small amount of impurities can cause defects in the chip, making the chip unusable. The new Heraeus emitter uses a specially developed quartz glass as the carrier material. It has extremely high chemical purity (consisting only of silicon and oxygen) and is best suited for these heating processes. Heraeus Specialty Light Sources has developed a sample of black.infrared infrared emitters that can heat tight spaces in as uniform a manner as possible. This helps to optimize the utilization of process space.
Test and development data show that the optimized and adjusted transmitter has very high heating uniformity and can obtain high energy efficiency. Deere said: "The black.infrared infrared transmitter for the first time achieves high optical performance when combined with an infrared transmitter in the medium wave range of about 2.5 microns." Because the medium-wavelength infrared transmitter is particularly suitable for heating glass, Materials such as plastics and most coatings will allow more industrial heating processes to use this new infrared heating system in the future.