On November 3, 2021, the winners of the 2020 China National Science and Technology Awards were announced. Led by Academician He, the State Key Laboratory of Rare Metal Materials of China, Zhengzhou University and FJAS Electronic Materials Technology Corporation jointly completed the "High Performance ITO for Flat Panel Displays" The project results of the "Key Technology Development and Engineering of Target Materials" won the second prize of the National Technical Invention Award.
In response to the needs of China's flat panel display technology progress and application development, the project developed the key technology of "ITO (Indium Tin Oxide) target material pressureless oxygen atmosphere short process degreasing and sintering integration", a breakthrough solution to the full process of high-performance ITO target material The key common technical problem of "stuck neck" has improved the overall technical level of China's ITO target industry and broke the foreign technology monopoly. For the first time, large-size ITO targets have been successfully applied to BOE's high-generation TFT panel sputtering, realizing the use of ITO in China's display technology. The important transformation of target materials "from scratch, from low-end to high-end, from being restricted to independent and effective supply, from imitating tracking to forming a complete independent technological system".
ITO target
ZGXB Rare Metal Materials Research Institute and the State Key Laboratory of Rare Metal Materials have devoted themselves to basic research on the application of ITO powder preparation and sintering technology, and achieved significant breakthroughs, laying an important foundation for the implementation of this project and the localization of key substrates for flat panel displays in China .