The world`s strongest lithography machine manufacturer is ASML, the most advanced EUV lithography machine at present, but in fact, all ASML technologies and even parts are not produced by itself. Strictly speaking, ASML is only a solution integrator. The technology of many manufacturers was deeply bundled with some key manufacturers, and the EUV lithography machine was finally built.
Today, I will introduce you to the manufacturer that provides EUV lithography machine lenses to ASML. It is Zeiss SMT of Germany.
Zeiss SMT is currently the world's top optical technology company. It is in the world's leading position in various optical equipment, such as myopia glasses, cameras, lenses and so on.
Until now, only the German Zeiss SMT can make the "flatest on earth" mirror, and such mirrors are used in the most advanced 5nm EUV lithography machine.
In the EUV lithography machine, the Zeiss SMT mirror used by ASML is also called the Bragg reflector. Its function is to collect the scattered extreme ultraviolet rays into beams and turn them into light rays with controllable directions.
The diameter of this reflector is only about 30 cm, and the thickest dielectric layer is only 1 mm thick. It is currently the smoothest surface in the world.
In order to cooperate with Zeiss SMT, in November 2016, ASML invested 1 billion euros to purchase 24.9% of the shares of Zeiss SMT, and promised to invest 540 million euros by 2022 to support the research and development of Zeiss SMT. Investing money to continue to promote Zeiss to develop a new generation of EUV lithography equipment will be equipped with a larger numerical aperture optical system.
At present, in the EUV field, Zeiss SMT and ASML are the first and second players in the EUV field in terms of technology patent applications, with no rivals.
Therefore, to a certain extent, ASML and Zeiss SMT are actually integrated. The cooperation between the two parties has formed a very high barrier to competition. Other manufacturers want to produce EUV lithography machines. It is difficult to produce EUV lithography machines without Zeiss SMT optics.