ASML, the world's largest lithography machine manufacturer, will begin to provide a new EUV protective film for lithography machines this year, with a light transmittance of 90.6%, and is about to start production now. It is reported that this film was jointly developed by ASML and Teradyne, and was manufactured by Mitsui Chemicals, Japan, and has passed the 400 watt test.
This kind of protective film is mainly used to install between the EUV light path and the wafer manufacturing space to prevent dust. ASML developed the mask film for the first time in 2016, and its light transmittance was 78%. Then in 2018, the light transmittance of the film increased to 80%, last year to 85%, and the price of one piece was as high as US$26,000. Samsung and TSMC currently do not use this kind of protective film for production efficiency, although this will increase the risk of contamination of the wafer surface. The two foundries have previously stated that they need a protective film with a light transmittance of more than 90% before they will consider applying it to the production line.
As the leader of the lithography machine industry, and currently the only manufacturer in the world that can manufacture extreme ultraviolet lithography machines, the extreme ultraviolet lithography machines required for mass production of TSMC, Samsung, and Intel's advanced chip process technology are all provided by ASML. According to the Q1 quarterly financial report released by ASML, its revenue in the quarter was 4.364 billion euros, an increase of 79% year-on-year, and the same period last year was 2.441 billion euros; net profit was 1.331 billion euros, an increase of 240% year-on-year, and the same period last year was 391 million euros. .
Peter Winner, President and CEO of ASML, said: "Benefiting from the increase in cumulative installed management sales, our first quarter sales and gross profit margin exceeded expectations." Peter Winner pointed out that compared with three months ago, all details The demand for sub-markets and product portfolios has increased significantly, and it is expected that revenue in 2021 will achieve a 30% growth.