Large-size high-purity silicon single crystal is the core component material of advanced semiconductor equipment and an important guarantee for the yield of nano-scale semiconductor manufacturing processes. After 4 years of research and development, China's national key research and development program "preparation technology for large-scale high-purity rare metal products" has yielded fruitful results. BJYY Semiconductor Material Technology Group successfully conquered large-scale high-purity silicon single crystal technology and developed it in SDDZ economic technology. The district realizes industrialized production.
Based on independent innovation, this achievement has formed a unique heating device, single crystal signal detection scheme, finishing control method, dislocation defect judgment device, temperature closed-loop control and other means, which effectively solves the thermal stress, solid-liquid and solid-liquid growth process of large-size single crystals. Interfacial stability, oxygen content, purity, typical defects and resistivity control have reached the world's leading level. More than 20 series of products have been formed to fully cover the needs of customers. The diameter of the grown single crystal reaches 18 inches (ie 450mm), which is global The largest silicon single crystal size, the purity can reach 11N. The products are used by all silicon component manufacturers in the United States, Japan, and South Korea. They are installed in the etching machine products of top semiconductor equipment manufacturers such as Lam Research and Tokyo Electronics, and used in production lines such as TSMC. With the rapid development of the semiconductor industry and the increasingly miniaturized semiconductor manufacturing process, the demand for large-size high-purity silicon single crystals and precision silicon components will grow rapidly, and the market prospects for this achievement are broad.