SHAJ Electronic Materials Technology Group focuses on the R&D and manufacturing of CMP polishing liquid and photoresist remover, and its products are used in integrated circuit manufacturing and advanced packaging fields. The company successfully broke the monopoly of foreign manufacturers on chemical mechanical polishing fluids in the field of integrated circuits, with a global market share of about 3.4%, and realized import substitution, enabling China to have independent supply capabilities in this field.
The company's CMP polishing liquid products include copper and copper barrier layer series, other series (including tungsten polishing liquid, silicon polishing liquid, oxide polishing liquid), etc. At present, the company's CMP polishing fluid has achieved large-scale production and sales at the 130-14nm technology node, which is mainly used in China's mainstream 8-inch and 12-inch wafer production lines; breakthroughs have also been made in the development of products at the 10-7nm technology node.
The company's photoresist remover includes multiple series of products for integrated circuit manufacturing, wafer-level packaging, LED/OLED use, etc. At present, the company's copper Damascus process photoresist remover has been mass-produced and continues to expand its application; the back end of the 28nm technology node The verification work of photoresist remover for hard mask process is continuing; the research of etching residue remover at the back of the 14nm technology node is ongoing.
At present, China's high-end photoresist removers mainly rely on imports. The industry leaders include Versum and Entegris in the United States. Chinese photoresist remover manufacturers represented by SHAJ and SHXY are gradually emerging.
SHAJ's photoresist remover in the integrated circuit field has been supplied to SMIC (688981), Huahong Grace, Silan Micro (600460), Jingfang Technology (603005), Yangtze River Storage and other customers in 2009. , SHXY has realized stable supply of copper process cleaning fluid and aluminum process cleaning fluid used in wafer process since 2018.
Technology R & D:
SHAJ attaches great importance to R&D. The 2020 H1 R&D investment is 35 million yuan, a year-on-year increase of 27.33%, and the R&D expense ratio has stabilized at over 18%, far surpassing comparable domestic and foreign companies such as SHXY and Cabot.
The company`s R&D team members all have master's and doctoral degrees from well-known universities at home and abroad, mostly from Cabot, Applied Materials…
The company has a series of internationally leading core technologies, covering the entire product formula and process flow, including metal surface oxidation (catalysis) technology, metal surface corrosion inhibition technology, polishing rate adjustment technology, chemical mechanical polishing wafer surface topography control technology, Metal anti-corrosion technology in photoresist cleaning, surface cleaning technology after chemical mechanical polishing, photoresist residue removal
Technology etc. On the whole, the company's CMP polishing liquid technology is at the international leading level, and the photoresist removal technology is at the domestic leading level.
In the first half of 2020, the company made a number of breakthroughs in research and development: In terms of polishing liquids for copper and copper barriers, the company continued to optimize the performance and stability of the mass-produced 14nm technology node and above products, and the technology research and development of the 10nm-7nm technology node proceeded as planned , A number of products have been mass-produced and sold in the field of logic and memory chips and continued to be improved; in terms of tungsten polishing fluid, the company has applied a number of products to the advanced 3D NAND process and continued to optimize and improve, and new tungsten polishing fluid products The field of logic chips has also entered the stage of customer demonstration; in terms of dielectric material polishing liquid, ceria-based products have been verified in the advanced 3D NAND process; in terms of photoresist remover, the company’s copper damascene process photoresist remover It has been mass-produced and continues to expand its application, and the photoresist remover for the hard mask process at the end of the 28nm technology node is being verified.
At the same time, the company has been responsible for many major national special projects, demonstrating the country's recognition of the company's technical strength. In 2015, as the project responsible unit, the company completed two national "02 special projects" for the research and development and industrialization of key polishing materials for "90-65nm" and "45-28nm" integrated circuits; at present, the company is responsible for the "high density The “02 Special Projects” of the two countries, including TSV polishing fluid and cleaning fluid R&D and industrialization, and CMP polishing fluid and supporting material technology platform and product series, have been smoothly advanced.
In terms of patents, as of December 31, 2018, the company has 190 authorized patents, all of which are invention patents, including 140 in Mainland China, 42 in Taiwan, 4 in the United States, 3 in Singapore, and 1 in South Korea.
client status:
The company has successfully entered the supply chain of leading customers at home and abroad. In 2008, it entered the supply chain of SMIC. In 2009, it began to provide stable supplies to customers such as Hua Hong Grace, Silan Micro, and China Resources Micro. In 2014, the company successfully entered the TSMC supply chain.
The top five customers in 2018 were industry leaders such as SMIC, TSMC, Yangtze River Storage, China Resources Micro and Hua Hong Grace, and their sales accounted for a total of 84%. The company’s products are key materials for downstream customers, so there is a strict supplier certification mechanism. Once the product passes downstream customer certification, it usually forms strong commercial stickiness: the company has been cooperating with SMIC for nearly twelve years, and has cooperated with Yangtze River Storage, China Resources Micro, and Hua Hong and others have cooperated for more than ten years.
The company`s becoming a leading supplier in SMIC, TSMC and other industries means that the company’s products have met the process requirements of world-class foundries, and the cooperation experience and successful cases with well-known downstream customers have a good endorsement effect, which helps The company further expands cooperation opportunities with new and old customers, laying a solid foundation for the company's business expansion and revenue growth.
From 2016 to 2018, the company added Sanan Optoelectronics, Leon Micro, Hehui Optoelectronics, Yangtze River Storage and other customers, quickly starting volume: Sanan Optoelectronics sales increased from 5.06 million in 2016 to 7.37 million in 2018, with a CAGR of 20.69%, the sales of Leon Micro, Silan Jixin and Hehui Optoelectronics also achieved substantial growth.
In terms of new products, the company's tungsten polishing fluid research and development project was established in 2016 and successfully imported into Yangtze River Storage in 2018. The tungsten polishing fluid business ushered in an increase in volume. With the continuous introduction of new customers and the continuous verification of new products, the company is expected to continue to increase its performance.