Founded in 1990, SHXA Microelectronics Technology Group is a high-tech enterprise dedicated to the research and development and production of high-end silicon-based materials. Its core technology originates from the Institute of Microelectronics of the Chinese Academy of Sciences and was established with Chinese and foreign investors.
SHXA is currently a leading SOI material production base in China and one of the few large-scale SOI material suppliers in the world. With SIMOX (oxygen injection isolation), Bonding (bonding) and Simbond (completely independently developed SOI new technology) and Smart-cut four types of SOI wafer manufacturing technology, can provide 100mm (4 inches), 125mm (5 inches) and 150mm (6 inches) SOI wafers and SOI epitaxial wafers, can provide 8-inch SOI wafers in batches.
The product series include high-dose, low-dose, ultra-thin, high-resistance SIMOX wafers, Bonding wafers, Simbond wafers and wafers based on Smart-cut technology, and can be extended to the required surface silicon thickness according to user needs.
SHXA's rich products can cover most of the application areas of SOI, and its product quality and technical capabilities have been recognized by internationally renowned companies. At present, more than 90% of Simao’s products are sold to the United States, Japan, Europe, Russia, South Korea, Taiwan, Singapore and other places, and it has become a supplier of well-known international companies.
The company is currently also a leading supplier of epitaxial silicon wafers in China. It can provide epitaxial silicon products and epitaxial processing services with specifications and requirements of 4-6 inches. It has begun to provide 8-inch epitaxial wafers in batches. Since 2003, SHXA has established itself as an extension enterprise with leading domestic product quality, leading technology, and leading production scale. Today, SHXA's extended customers have spread to the United States, Japan, South Korea, Taiwan, Russia, India and other countries and regions.
In 2005, SHXA won the first prize of Shanghai Municipal Science and Technology Progress Award;
In 2006, SHXA's "High-end Silicon-based SOI Material Research and Industrialization" project won the first prize of National Science and Technology Progress;
In 2007, the high-end silicon-based SOI material research group won the Outstanding Scientific and Technological Achievement Award of the Chinese Academy of Sciences;
In December 2010, the new SHXA plant was completed and put into production, the EPI production capacity has been expanded to more than twice, and the SOI production capacity has also been scaled up. Moreover, both businesses have broken through the 8-inch technology and achieved industrialization;
On May 23, 2014, SHXA reached a strategic cooperation agreement with a French company and launched an international industrial cooperation;
In September 2015, SHXA successfully prepared the first batch of 8-inch SOI wafers based on hydrogen injection layer transfer technology.