On the morning of November 9, 2021, the world's largest ultra-high-purity tantalum project for VLSI manufacturing was put into production, LSTC Semiconductor Materials Technology Corporation was held.
This is China's first electronic-grade ultra-high-purity tantalum material industrial base.
Tantalum metal is an important strategic resource of the country and an indispensable key material in the manufacture of very large-scale integrated circuits. The global ultra-high-purity tantalum technology used in high-end chip manufacturing is monopolized by two companies in the United States and Japan. Previously, China was completely dependent on imports.
LSTC's R&D team has broken through core technologies such as ultra-high-purity tantalum purification and electron beam smelting. It has complete independent intellectual property rights. It has realized the complete localization of manufacturing equipment, filled the gap in China in this field, and ended China's long-term dependence on imports. The situation has solved a "technical bottleneck" problem in the field of materials used in integrated circuit manufacturing.
The project has invested in 6 internationally leading electron beam furnaces, the largest in China. After being put into operation, they will have an annual output of 400 tons of electronic grade ultra-high purity tantalum. After full production, the output value will exceed 5 billion yuan. The production capacity of ultra-high purity tantalum materials will reach the global top level.